I-Nitrogen Trifluoride (NF3) Igesi Ehlanzekile Ephakeme
Ulwazi Oluyisisekelo
| I-CAS | 7783-54-2 |
| EC | 232-007-1 |
| UN | 2451 |
Iyini le nto?
I-Nitrogen trifluoride (NF3) iyigesi engenambala nengenaphunga ekamelweni lokushisa kanye nokucindezela komkhathi. Ingenziwa uketshezi ngaphansi kwengcindezi emaphakathi. I-NF3 izinzile ngaphansi kwezimo ezijwayelekile futhi ayiboli kalula. Kodwa-ke, ingabola lapho ibhekene namazinga okushisa aphezulu noma kukhona ama-catalysts athile. I-NF3 inamandla aphezulu okufudumala kwembulunga yonke (GWP) uma ikhishwa emkhathini.
Isetshenziswa kuphi le nto ?
I-ejenti yokuhlanza embonini ye-elekthronikhi: I-NF3 isetshenziswa kabanzi njenge-ejenti yokuhlanza yokususa ukungcola okusalile, okufana nama-oxides, ezindaweni ezingaphezulu kwama-semiconductors, amaphaneli wokubonisa i-plasma (PDPs), nezinye izingxenye ze-elekthronikhi. Ingakwazi ukuhlanza lezi zindawo ngaphandle kokuzilimaza.
I-etching gas ekwenziweni kwe-semiconductor: I-NF3 isetshenziswa njengegesi yokuhlanganisa enqubweni yokukhiqiza yama-semiconductor. Isebenza kahle kakhulu ekufakeni i-silicon dioxide (SiO2) ne-silicon nitride (Si3N4), okuyizinto ezivamile ezisetshenziswa ekwenziweni kwamasekethe ahlanganisiwe.
Ukukhiqizwa kwezinhlanganisela ze-fluorine ezihlanzekile: I-NF3 iwumthombo obalulekile we-fluorine ekukhiqizeni izinhlanganisela ezihlukahlukene eziqukethe i-fluorine. Isetshenziswa njengesandulela ekukhiqizeni ama-fluoropolymers, ama-fluorocarbon, namakhemikhali akhethekile.
Ukukhiqizwa kwe-Plasma ekukhiqizweni kwephaneli eliyisicaba: I-NF3 isetshenziswa kanye namanye amagesi ukuze kwakheke i-plasma ekukhiqizeni izibonisi zamaphaneli ayisicaba, njengezibonisi zekristalu eliwuketshezi (LCDs) kanye nama-PDP. I-plasma ibalulekile ekufakweni nasekufakeni izinqubo ngesikhathi sokwenziwa kwamaphaneli.
Qaphela ukuthi izinhlelo zokusebenza ezithile kanye nemithethonqubo yokusetshenziswa kwalesi sisetshenziswa/umkhiqizo ingahluka ngezwe, izimboni nenjongo. Hlala ulandela imihlahlandlela yokuphepha futhi uxhumane nochwepheshe ngaphambi kokusebenzisa le nto/umkhiqizo kunoma yiluphi uhlelo lokusebenza.
